JPS62146591U - - Google Patents
Info
- Publication number
- JPS62146591U JPS62146591U JP3220486U JP3220486U JPS62146591U JP S62146591 U JPS62146591 U JP S62146591U JP 3220486 U JP3220486 U JP 3220486U JP 3220486 U JP3220486 U JP 3220486U JP S62146591 U JPS62146591 U JP S62146591U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- bearing
- positioning
- stage
- corner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 5
- 238000009966 trimming Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3220486U JPS62146591U (en]) | 1986-03-06 | 1986-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3220486U JPS62146591U (en]) | 1986-03-06 | 1986-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62146591U true JPS62146591U (en]) | 1987-09-16 |
Family
ID=30838658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3220486U Pending JPS62146591U (en]) | 1986-03-06 | 1986-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62146591U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02123389U (en]) * | 1989-03-23 | 1990-10-11 |
-
1986
- 1986-03-06 JP JP3220486U patent/JPS62146591U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02123389U (en]) * | 1989-03-23 | 1990-10-11 |